表面検査方法および装置 - Panasonic Corporation

Title:

表面検査方法および装置

Document Type and Number:

Japanese Patent JP4544949

Kind Code:

B2

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Inventors:

Hiroshi Hayada
Takafumi Okuma
Yamashita Hideki

Application Number:

JP2004269066A

Publication Date:

September 15, 2010

Filing Date:

September 16, 2004

Export Citation:

Assignee:

Panasonic Corporation

International Classes:

G01N27/02; G01N21/62; G01N23/225

Domestic Patent References:

Attorney, Agent or Firm:

Yoshihiro Morimoto
Toshiji Sasahara
Yohei Harada

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