Title:
基板の位置決め方法及びこの方法を用いた検査装置
Document Type and Number:
Japanese Patent JP4546066
Kind Code:
B2
Inventors:
Shogo Kosuge
Kiyoshi Isubo
Kichihara Michio
Shigenobu Otsuka
Kiyoshi Isubo
Kichihara Michio
Shigenobu Otsuka
Application Number:
JP2003386369A
Publication Date:
September 15, 2010
Filing Date:
November 17, 2003
Export Citation:
Assignee:
Hitachi Kokusai Electric Co., Ltd.
International Classes:
H01L21/66; H01L21/68; H01L21/683
Domestic Patent References:
| JP5042657A | ||||
| JP8313815A | ||||
| JP9278179A | ||||
| JP8046017A | ||||
| JP3101119A | ||||
| JP2002270678A | ||||
| JP11214486A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation