Title:
基板処理装置用クリーニング部材の再利用方法
Document Type and Number:
Japanese Patent JP4557307
Kind Code:
B2
Inventors:
Ryo Namikawa
Yoshio Terada
Hirofumi Fujii
Sei Ishizaka
Yoshio Terada
Hirofumi Fujii
Sei Ishizaka
Application Number:
JP2005208033A
Publication Date:
October 06, 2010
Filing Date:
July 19, 2005
Export Citation:
Assignee:
NITTO DENKO CORPORATION
International Classes:
H01L21/304; C09J7/02; C09J11/00; C09J201/00
Domestic Patent References:
| JP10154686A | ||||
| JP11224869A | ||||
| JP2005034834A | ||||
| JP2002180044A | ||||
| JP2001323247A |
Attorney, Agent or Firm:
祢▲ぎ▼元 邦夫