Title:
基板検査装置
Document Type and Number:
Japanese Patent JP4563847
Kind Code:
B2
Inventors:
Tatsuo Ichise
Application Number:
JP2005076947A
Publication Date:
October 13, 2010
Filing Date:
March 17, 2005
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G01N21/93; G01N21/956; G02F1/13; G09F9/00; H01J9/02; H01J11/22; H01J11/34
Domestic Patent References:
| JP200561956A | ||||
| JP2004333198A | ||||
| JP200428706A | ||||
| JP625969A |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
Kiyoshi Kato
Masatake Shiga
Masakazu Aoyama
Suzuki Mitsuyoshi
Tadao Takashiba
Hiroshi Masui
Kiyoshi Kato