Title:
位置検出装置およびその調整方法
Document Type and Number:
Japanese Patent JP4565248
Kind Code:
B2
Inventors:
Koichiro Komatsu
Application Number:
JP2001022452A
Publication Date:
October 20, 2010
Filing Date:
January 30, 2001
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/26; H01L21/027; G03F9/00
Domestic Patent References:
| JP2000146528A | ||||
| JP9280816A |
Foreign References:
| WO1999040613A1 |
Attorney, Agent or Firm:
Takao Yamaguchi