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Title:
電解ガス処理装置および硫酸リサイクル型洗浄システム
Document Type and Number:
Japanese Patent JP4605393
Kind Code:
B2
Abstract:

To avoid problems such as decrease in safety due to an electrolyzed gas included in an electrolyte generated by electrolysis.

The electrolytic processing apparatus includes a transport line 202 to transport the electrolyte and electrolyzed gas generated by electrolysis in an electrolytic device, and a gas-liquid separating means 20 disposed in the transport line 202 and separating the electrolyte from the electrolyzed gas. A sulfuric acid recycle type cleaning system includes a cleaning device 1 to clean an object material to be cleaned with persulfuric acid solution as a cleaning liquid, an electrolytic device 4 to regenerate a persulfuric acid solution by an electrolytic reaction to generate persulfate ion from sulfate ion included in a cleaning waste liquid of the cleaned material, and the above electrolytic processing apparatus 20. By separating the electrolyzed gas from the electrolyte generated by the electrolysis, hazard by the electrolyzed gas is eliminated and the electrolyte can be safely used.

COPYRIGHT: (C)2008,JPO&INPIT


Inventors:
Kanamori Haruichi
Norihito Ikemiya
Application Number:
JP2006091511A
Publication Date:
January 05, 2011
Filing Date:
March 29, 2006
Export Citation:
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Assignee:
Kurita Water Industries Ltd.
International Classes:
C25B1/30; C25B9/00; C25B15/08; H01L21/304
Domestic Patent References:
JP63250481A
JP2006051457A
JP11171504A
JP2077590A
Foreign References:
WO2006030816A1
Attorney, Agent or Firm:
Yuki Yokoi