To avoid problems such as decrease in safety due to an electrolyzed gas included in an electrolyte generated by electrolysis.
The electrolytic processing apparatus includes a transport line 202 to transport the electrolyte and electrolyzed gas generated by electrolysis in an electrolytic device, and a gas-liquid separating means 20 disposed in the transport line 202 and separating the electrolyte from the electrolyzed gas. A sulfuric acid recycle type cleaning system includes a cleaning device 1 to clean an object material to be cleaned with persulfuric acid solution as a cleaning liquid, an electrolytic device 4 to regenerate a persulfuric acid solution by an electrolytic reaction to generate persulfate ion from sulfate ion included in a cleaning waste liquid of the cleaned material, and the above electrolytic processing apparatus 20. By separating the electrolyzed gas from the electrolyte generated by the electrolysis, hazard by the electrolyzed gas is eliminated and the electrolyte can be safely used.
COPYRIGHT: (C)2008,JPO&INPIT
Norihito Ikemiya
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