Title:
真空処理装置および真空処理方法
Document Type and Number:
Japanese Patent JP4627392
Kind Code:
B2
Inventors:
Susumu Arai
Application Number:
JP2001293954A
Publication Date:
February 09, 2011
Filing Date:
September 26, 2001
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/50; H01L21/68; C23C16/458
Domestic Patent References:
| JP11111821A | ||||
| JP9181154A | ||||
| JP11145149A | ||||
| JP11350123A | ||||
| JP2918780B2 |
Attorney, Agent or Firm:
Junichi Omori
Ori Akira
Yasuo Iisaka
Ori Akira
Yasuo Iisaka