Title:
支持された、および独立した3次元のマイクロまたはナノ構造体のインプリント方法
Document Type and Number:
Japanese Patent JP4630898
Kind Code:
B2
Abstract:
The present invention is directed to micro- and nano-scale imprinting methods and the use of such methods to fabricate supported and/or free-standing 3-D micro- and/or nano-structures of polymeric, ceramic, and/or metallic materials. In some embodiments, a duo-mold approach is employed in the fabrication of these structures. In such methods, surface treatments are employed to impart differential surface energies to different molds and/or different parts of the mold(s). Such surface treatments permit the formation of three-dimensional (3-D) structures through imprinting and the transfer of such structures to a substrate. In some or other embodiments, such surface treatments and variation in glass transition temperature of the polymers used can facilitate separation of the 3-D structures from the molds to form free-standing micro- and/or nano-structures individually and/or in a film. In some or other embodiments, a “latch-on” assembly technique is utilized to form supported and/or free-standing stacked micro- and/or nano-structures that enable the assembly of polymers without a glass transition temperature and eliminate the heating required to assemble thermoplastic polymers.
Inventors:
Yen Pen Kong
Hong Ye Low
Stella W Pan
Albert F Yeh
Hong Ye Low
Stella W Pan
Albert F Yeh
Application Number:
JP2007514999A
Publication Date:
February 09, 2011
Filing Date:
May 24, 2005
Export Citation:
Assignee:
AGENCY FOR SCIENCE,TECHNOLOGY AND RESEARCH
The Regents of the University of Michigan
The Regents of the University of Michigan
International Classes:
B29C59/04; B28B11/08; B29C59/02; B29C69/02; B81C1/00; B81C99/00; B82B1/00; B82B3/00; G02B1/10; G03C5/00; G03F7/00
Domestic Patent References:
| JP2005153091A | ||||
| JP10329213A | ||||
| JP2004504718A | ||||
| JP2005524984A | ||||
| JP2004363584A | ||||
| JP2005515617A | ||||
| JP2004188822A |
Foreign References:
| US6860956 | ||||
| US20040219249 | ||||
| US5512131 |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Mitsuo Tanaka