Title:
粘着フィルム貼着装置
Document Type and Number:
Japanese Patent JP4637692
Kind Code:
B2
Inventors:
Kazuma Sekiya
Application Number:
JP2005259754A
Publication Date:
February 23, 2011
Filing Date:
September 07, 2005
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/683; H01L21/301
Domestic Patent References:
| JP6097268A | ||||
| JP5121384A |
Attorney, Agent or Firm:
Hiroaki Sakai