Title:
表面検査方法及び装置
Document Type and Number:
Japanese Patent JP4652024
Kind Code:
B2
Abstract:
There have been disclosed a surface inspection method and a surface inspection apparatus for inspecting the surface of an article, the surface being almost flat and continuous and having non-flat parts with convex shapes and concave shapes provided based on specifications, capable of inspecting for defective parts in the non-flat parts without detecting the non-flat parts as defective parts. The surface inspection apparatus comprises an image pickup device, a correction data calculation unit for calculating non-flat part correction data for making the image of the non-flat part into one equivalent to the image of the flat part based on the difference between the image of the non-flat part and the image of the flat part, a non-flat correction unit for correcting the image of the non-flat part based on the non-flat part correction data, and a defect detection unit for detecting defects on the article surface by processing the image of the article surface after correcting the image of the non-flat part.
More Like This:
Inventors:
Akihiro Wakabayashi
Application Number:
JP2004337053A
Publication Date:
March 16, 2011
Filing Date:
November 22, 2004
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01N21/88
Domestic Patent References:
| JP2002312764A | ||||
| JP2001280939A |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Kurachi Yasuyuki
Masaya Nishiyama
Jun Tsuruta
Kurachi Yasuyuki
Masaya Nishiyama