Title:
塗布装置および塗布方法
Document Type and Number:
Japanese Patent JP4659345
Kind Code:
B2
Inventors:
Akihiro Shigeyama
Takahiro Yamazaki
Kenta Sato
Shinji Kajiwara
Daisuke Matsushima
Takahiro Yamazaki
Kenta Sato
Shinji Kajiwara
Daisuke Matsushima
Application Number:
JP2003201780A
Publication Date:
March 30, 2011
Filing Date:
July 25, 2003
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
B05C11/00; B41J2/01; B05C5/00; B05C11/10; B05D1/26
Domestic Patent References:
| JP11320925A | ||||
| JP5149769A | ||||
| JP2277573A | ||||
| JP4114444A | ||||
| JP2002139370A | ||||
| JP11105307A | ||||
| JP11248927A |
Attorney, Agent or Firm:
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto
Makoto Nakamura
Kurata Masatoshi
Sadao Muramatsu
Ryo Hashimoto