Title:
2枚の基板を接合するためのマイクロポンプ
Document Type and Number:
Japanese Patent JP4664309
Kind Code:
B2
Abstract:
The invention relates to a device provided with channel-type structures for transporting and/or storing a liquid and/or gaseous medium. The device comprises a first (1) substrate layer and a second substrate layer (2), and a functional element (3) that is sandwiched between the first and second substrate layers, the channel-type structures being embodied in the first and/or second substrate layer. The first and second substrate layers are solidly and permanently interconnected, and the functional element is clamped between the first and second substrate layers. The functional element is elastic, the first and second layers are rigid, and the channel-type structures in the first and/or second substrate layers are at least partially sealed in a gas-tight and/or liquid-tight manner due to the functional element.
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Inventors:
Mike Necht, Ron
Application Number:
JP2006544383A
Publication Date:
April 06, 2011
Filing Date:
December 20, 2004
Export Citation:
Assignee:
Bertels Microtechnik Gesellschaft Mitt Beschlenkter Haftunck
International Classes:
F04B45/04; F04B43/04; F04B45/047; F04B53/10
Domestic Patent References:
| JP11241683A | ||||
| JP11218081A | ||||
| JP8210528A | ||||
| JP57136883U | ||||
| JP3070884A | ||||
| JP3122282U | ||||
| JP2003534504A |
Foreign References:
| WO2002053290A1 | ||||
| US20020155010 |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Kiyoshi Inagaki
Hiroyuki Mori
Go Sakuma
Kiyoshi Inagaki
Hiroyuki Mori