Title:
設計主導型検査または測定
Document Type and Number:
Japanese Patent JP4666918
Kind Code:
B2
Abstract:
Design driven inspection/metrology methods and apparatus are provided. A recipe is a set of instructions including wafer processing parameters, inspection parameters, or control parameters for telling an inspection/metrology system how to inspect/measure a wafer. Design data is imported into a recipe extraction system that recognizes instances of target structures and configures recipe parameters accordingly, thereby reducing manual instrument setup time, improving inspection/measurement accuracy, and improving fabrication efficiency.
Inventors:
Bevis, Christopher, F.
Application Number:
JP2003556921A
Publication Date:
April 06, 2011
Filing Date:
December 19, 2002
Export Citation:
Assignee:
KLA-Tenko Corporation
International Classes:
H01L21/66; G03F7/20
Domestic Patent References:
| JP2001338304A | ||||
| JP2000155099A |
Attorney, Agent or Firm:
Yoshihito Iizuka