To solve the problem that tens of kV of voltage is applied between accelerating electrodes in a charged particle accelerator and in this case, electric discharge may occur between the accelerating electrodes.
In the charged particle accelerator, a portion or the whole of the accelerating electrode is covered with a discharge-inhibiting layer made of a ceramics or an alloy whose melting point is higher than metal. Depending on the discharge-inhibiting layer of the ceramics or the alloy, particulates of impurities are accelerated by an electric field, and, even when coming into collision with the electrode, metallic vapor is hard to generate from the electrode and hard to become ionization plasma, so that the electric discharge between the electrodes is inhibited.
COPYRIGHT: (C)2010,JPO&INPIT
Ryozo Takeuchi
Toshiyuki Yokosuka
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