Title:
半導体製造装置、装置動作パラメータの管理方法、およびプログラム
Document Type and Number:
Japanese Patent JP4697896
Kind Code:
B2
Abstract:
A process information managing device including recipe storage units that store two or more recipes which comprise information about a process maintained by two or more control devices, and correspond to the two or more control devices, respectively, a receiving unit that receives process parameter information that is information about process parameters included in the two or more recipes, a recipe information obtaining unit that searches for a recipe in the recipe storage unit by using the process parameter information and obtains recipe information that is information about the found recipe, and an output unit that outputs the recipe information obtained by the recipe information obtaining unit makes it possible to easily determine the one or more recipes affecting a change in the process parameters.
Inventors:
Noriaki Kanaya
Asakawa Kouki
Kiyohito Iijima
Hirose Masayuki
Asakawa Kouki
Kiyohito Iijima
Hirose Masayuki
Application Number:
JP2007078013A
Publication Date:
June 08, 2011
Filing Date:
March 24, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/02
Domestic Patent References:
| JP2006013282A | ||||
| JP2006013224A | ||||
| JP2005532761A |
Attorney, Agent or Firm:
Hidekazu Tanikawa