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Title:
真空紫外レーザ装置の波長測定装置
Document Type and Number:
Japanese Patent JP4699640
Kind Code:
B2
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Inventors:
Takanobu Nakaike
Toru Suzuki
Wakabayashi Osamu
Application Number:
JP2001178030A
Publication Date:
June 15, 2011
Filing Date:
June 13, 2001
Export Citation:
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Assignee:
Gigaphoton Co., Ltd.
International Classes:
G01J9/02; G01J1/02; G01J1/58; G01J3/18; G01J3/26; H01S3/00
Domestic Patent References:
JP2000205966A
JP2000098094A
JP2000340869A
JP2000266605A
JP2003503861A
Foreign References:
WO2001001532A1
Attorney, Agent or Firm:
Takahisa Kimura



 
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