基板の位置決め方法、基板の位置決め装置、搬送装置及びプロセス装置

Title:

基板の位置決め方法、基板の位置決め装置、搬送装置及びプロセス装置

Document Type and Number:

Japanese Patent JP4719124

Kind Code:

B2

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Inventors:

Horie Shigeyoshi
Masaki Kono
Yoshimoto Tsumoto
Mitsunori Oizumi

Application Number:

JP2006295771A

Publication Date:

July 06, 2011

Filing Date:

October 31, 2006

Export Citation:

Assignee:

MITSUBISHI HEAVY INDUSTRIES,LTD.

International Classes:

H01L21/68

Domestic Patent References:

Attorney, Agent or Firm:

Toshiro Mitsuishi
Tadahiro Mitsuishi
Yasuyuki Tanaka
Hiroshi Matsumoto

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