Title:
ステージ装置のロック機構
Document Type and Number:
Japanese Patent JP4738160
Kind Code:
B2
Abstract:
To provide a lock mechanism of a stage device for surely securing a stage plate in a non-operation state at a prescribed position with a simple structure.
The lock mechanism of the stage device comprises a locking member 110 separable from the stage plates 60, 61, a plurality of locking holes 108, 109 drilled in the stage plates, and a plurality of lock pins 116, 117 having a smaller diameter edge part than the locking hole drilled in the locking member and attachable to and detachable from each locking hole.
COPYRIGHT: (C)2007,JPO&INPIT
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Inventors:
Makoto Mogamiya
Application Number:
JP2005362491A
Publication Date:
August 03, 2011
Filing Date:
December 15, 2005
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G03B5/00
Domestic Patent References:
| JP10232419A | ||||
| JP10003103A | ||||
| JP4328532A | ||||
| JP10221726A | ||||
| JP8076165A | ||||
| JP2003337361A | ||||
| JP2002099017A | ||||
| JP6067274A |
Attorney, Agent or Firm:
Kunio Miura