Title:
搬送アーム用パッド
Document Type and Number:
Japanese Patent JP4740188
Kind Code:
B2
Inventors:
Atsushi Hosokawa
Application Number:
JP2007123700A
Publication Date:
August 03, 2011
Filing Date:
May 08, 2007
Export Citation:
Assignee:
Mitsubishi Cable Industries, Ltd.
International Classes:
H01L21/677
Domestic Patent References:
JP2006108133A | ||||
JP2003100848A | ||||
JP2001179672A | ||||
JP2000093872A | ||||
JP11170188A | ||||
JP8143147A | ||||
JP6254786A | ||||
JP5121518A |
Attorney, Agent or Firm:
Takeshi Nakatani