Title:
基板搬送方法
Document Type and Number:
Japanese Patent JP4746027
Kind Code:
B2
Inventors:
Yasuhiko Hashimoto
Application Number:
JP2007319013A
Publication Date:
August 10, 2011
Filing Date:
December 10, 2007
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
H01L21/677; B25J9/06
Domestic Patent References:
| JP8111449A | ||||
| JP11135595A | ||||
| JP2005509277A |
Attorney, Agent or Firm:
Keiichiro Saikyo
Takeshi Sugiyama
Takeshi Sugiyama