Title:
特に加速度センサに用いられるマイクロメカニカル構造体
Document Type and Number:
Japanese Patent JP4750994
Kind Code:
B2
Abstract:
A micromechanical structure, particularly for an acceleration sensor, includes a substrate, which has an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position. The centrifugal mass has an oblong convex form and is essentially rotationally symmetric in relation to the longitudinal axis. The centrifugal mass optionally has a widening at both longitudinal ends, to which the flexible spring device is attached.
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Inventors:
Andreas Kip
Siegbert Getz
Marx Lutz
Siegbert Getz
Marx Lutz
Application Number:
JP2001544035A
Publication Date:
August 17, 2011
Filing Date:
November 11, 2000
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
G01P15/125; B81B3/00; H01L29/84
Domestic Patent References:
| JPH11311635A | 1999-11-09 |
Foreign References:
| US5565625A | 1996-10-15 | |||
| WO1998058265A1 | 1998-12-23 |
Attorney, Agent or Firm:
Toshio Yano
Takuya Kuno
Einzel Felix-Reinhard
Takuya Kuno
Einzel Felix-Reinhard