Title:
流体制御装置
Document Type and Number:
Japanese Patent JP4753173
Kind Code:
B2
Abstract:
A fluid control device that does not require a replacement space worth the length even when a rod shaped cartridge heater is used, enables maintenance if the replacement space worth the width is formed, and suppresses increase in the installation area involved therewith is provided. A concave part 2a opening to the side is formed in the supporting member 2. A heater member 3 is removably inserted from the side and fixed in the concave part 2a of the supporting member 2. The supporting member 2 is formed into a transverse cross section of a horseshoe shape by overlapping two plate shaped members 21, 22. The heater member 3 is inserted into the concave part 2a formed by two plate shaped members 21, 22 and fixed by a hexagon socket head cap screw 26.
Inventors:
Out on all sides
Application Number:
JP2005177162A
Publication Date:
August 24, 2011
Filing Date:
June 17, 2005
Export Citation:
Assignee:
Fujikin Co., Ltd.
International Classes:
F16K49/00; F16K27/00
Domestic Patent References:
| JP11002384A | ||||
| JP7074113A | ||||
| JP2003065462A |
Foreign References:
| WO2005109482A1 |
Attorney, Agent or Firm:
Norihiko Hibi
Einosuke Kishimoto
Akira Watanabe
Kiyosue Yasuko
Einosuke Kishimoto
Akira Watanabe
Kiyosue Yasuko