Title:
窒化アルミニウム粉末、窒化アルミニウム質セラミックス焼結体、半導体製造装置用部材、窒化アルミニウム発光材料、及び窒化アルミニウム粉末の製造方法
Document Type and Number:
Japanese Patent JP4753851
Kind Code:
B2
Abstract:
An aluminum nitride-based ceramic sintered body is provided, which is manufactured by sintering an aluminum nitride powder comprising aluminum nitride as a main component, carbon in an amount of 0.1 wt % or more to 1.0 wt % or less, and containing oxygen in an amount that is not greater than 0.7 wt %, wherein carbon and oxygen are dissolved in grains of the aluminum nitride powder. The a-axis length of the lattice constant of the aluminum nitride is in a range of 3.1120 Å or more to 3.1200 Å or less, and the a c-axis length of the lattice constant is in a range of 4.9810 Å or more to 4.9900 Å or less. The volume resistivity of the aluminum nitride-based ceramic sintered body at 500° C. is 109 Ω·cm or more.
Inventors:
Jun Yoshikawa
Yoshimasa Kobayashi
Naomi Teraya
Yoshimasa Kobayashi
Naomi Teraya
Application Number:
JP2006329776A
Publication Date:
August 24, 2011
Filing Date:
December 06, 2006
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
C01B21/072; C04B35/581; C04B35/626; H01L21/683
Domestic Patent References:
| JP8078202A | ||||
| JP2001172010A | ||||
| JP2003226580A | ||||
| JP2004182585A | ||||
| JP10053495A | ||||
| JP2006045047A | ||||
| JP2002193699A | ||||
| JP3271108A | ||||
| JP9048669A | ||||
| JP9315867A | ||||
| JP61201668A | ||||
| JP1298012A |
Foreign References:
| WO2006016711A1 |
Attorney, Agent or Firm:
Aitec International Patent Office
Nakamura Tomoyuki
Nakamura Tomoyuki