Title:
マスキング機構及びそれを備えた成膜装置
Document Type and Number:
Japanese Patent JP4766416
Kind Code:
B2
Inventors:
Hideomi Koinuma
Yuji Matsumoto
Kenji Itaka
Katayama Masashi
Yuji Matsumoto
Kenji Itaka
Katayama Masashi
Application Number:
JP2004251151A
Publication Date:
September 07, 2011
Filing Date:
August 30, 2004
Export Citation:
Assignee:
Japan Science and Technology Agency
International Classes:
C23C14/04; C23C14/28
Domestic Patent References:
| JP2004035983A | ||||
| JP2000234169A | ||||
| JP2002020858A | ||||
| JP61113141A |
Foreign References:
| WO2004027107A1 |
Attorney, Agent or Firm:
Kazuyuki Hirayama
Kaizu Hozo
Kaizu Hozo