Title:
最適化方法、最適化システム、及び、装置を製造する方法
Document Type and Number:
Japanese Patent JP4772401
Kind Code:
B2
Abstract:
A method for optimizing a structure of an industrial product includes selecting control factors from among manufacturing parameters affecting a target characteristic, which is scheduled to be manufactured by a sequence of manufacturing processes; setting levels to the respective control factors; selecting a reference characteristic having a trade-off relation with the target characteristic from among characteristics of the structure; setting a reference value to the reference characteristic; selecting a prior adjustment factor affecting the reference characteristic; creating conditions for experiments assigning combinations of the levels to the respective control factors; determining an adjustment value of the prior adjustment factor so that each of characteristic values of the reference characteristic obtained by the experiments conforms substantially to the reference value; and determining experimental characteristic values of the target characteristic using the adjustment value.
Inventors:
Kazumi Nishinohara
Mitsutoshi Nakamura
Kyoichi Suguro
Ichiro Taguchi
Koji Shirai
Mitsutoshi Nakamura
Kyoichi Suguro
Ichiro Taguchi
Koji Shirai
Application Number:
JP2005197892A
Publication Date:
September 14, 2011
Filing Date:
July 06, 2005
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L21/00; G06F17/50; H01L21/331; H01L21/336; H01L29/00; H01L29/73; H01L29/78
Domestic Patent References:
| JP2005033228A | ||||
| JP2002259464A | ||||
| JP62297973A |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Kawamata Sumio
Nakamura Tomoyuki
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu