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Title:
リソグラフィ装置
Document Type and Number:
Japanese Patent JP4825510
Kind Code:
B2
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Inventors:
Hans Janssen
Johannes Jacobs Mateus Baselmans
Schult Nicolas Lambertus Donders
Christian alexander hogendam
Jelone Johannes Sofia Maria Mertens
Johannes Catherine Hubertus Mulkens
Marco Coert Stafenga
Bob Strefkerk
Jan Cornelis van der Hoven
Cedric Degile Grovestra
Application Number:
JP2005364310A
Publication Date:
November 30, 2011
Filing Date:
December 19, 2005
Export Citation:
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Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
JP2000319038A
JP2000147204A
JP200440107A
JP2004165666A
JP2004289126A
Foreign References:
WO2004093130A1
WO2004105107A1
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki



 
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