Title:
液晶配向膜用真空蒸着装置およびその成膜方法
Document Type and Number:
Japanese Patent JP4835826
Kind Code:
B2
Inventors:
Tatsushi Ishigami
Ryuichiro Usui
Ryuichiro Usui
Application Number:
JP2005210987A
Publication Date:
December 14, 2011
Filing Date:
July 21, 2005
Export Citation:
Assignee:
Showa Vacuum Co., Ltd.
International Classes:
G02F1/1337; C23C14/24; C23C14/54
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Attorney, Agent or Firm:
Okabe
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu
Masao Okabe
Nobuaki Kato
Kazuo
Shinichi Usui
Takao Ochi
Teruhisa Motomiya
Asahi Shinmitsu