Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP4838612
Kind Code:
B2
Inventors:
Yohei Yamazawa
Application Number:
JP2006088156A
Publication Date:
December 14, 2011
Filing Date:
March 28, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; C23C16/509; H05H1/46
Domestic Patent References:
| JP8064393A | ||||
| JP2006040810A | ||||
| JP2003017298A | ||||
| JP2004531856A | ||||
| JP2004296953A | ||||
| JP2005340760A |
Attorney, Agent or Firm:
Filial piety Sasaki