Title:
水素化ガリウムガスの製造方法および窒化ガリウム結晶の製造方法
Document Type and Number:
Japanese Patent JP4900966
Kind Code:
B2
Inventors:
Kitano Tsukasa
Shigeru Morimoto
Shigeru Morimoto
Application Number:
JP2008071813A
Publication Date:
March 21, 2012
Filing Date:
March 19, 2008
Export Citation:
Assignee:
Sumitomo Seika Co., Ltd.
International Classes:
C30B29/38; C30B25/02; H01L21/205
Domestic Patent References:
| JP7206595A | ||||
| JP2009537438A |
Attorney, Agent or Firm:
Susumu Nemoto