Title:
GaN系半導体装置
Document Type and Number:
Japanese Patent JP4906023
Kind Code:
B2
Inventors:
Kiyoteru Yoshida
Takahiro Wada
Takahiro Wada
Application Number:
JP2001246113A
Publication Date:
March 28, 2012
Filing Date:
August 14, 2001
Export Citation:
Assignee:
THE FURUKAW ELECTRIC CO.,LTD.
International Classes:
H01L21/205; H01L21/338; H01L29/778; H01L29/812
Domestic Patent References:
| JP10294452A | ||||
| JP2001102565A | ||||
| JP2002520880A |
Foreign References:
| WO2000004587A1 |