Title:
水素ベースのプラズマを用いた処理による材料の清浄化
Document Type and Number:
Japanese Patent JP4914438
Kind Code:
B2
Abstract:
The present invention relates to a purification method for removing impurities containing oxygen from materials, especially boron, by hydrogen-based plasma treatment. The present procedure allows for efficient removal of oxygen while avoiding a thermal treatment that would substantially change the structure of the treated material, or a treatment leaving a reducing agent within the treated material.
Inventors:
Anastasia alexeva
Kirill Coineil
Pavel Chishof
Michael Bytinger
Lily green
Kirill Coineil
Pavel Chishof
Michael Bytinger
Lily green
Application Number:
JP2008511631A
Publication Date:
April 11, 2012
Filing Date:
May 17, 2006
Export Citation:
Assignee:
Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
International Classes:
C01B35/02; H05H1/46
Domestic Patent References:
| JP2000038622A | 2000-02-08 | |||
| JPS5515838B1 | 1980-04-26 | |||
| JPH10258262A | 1998-09-29 | |||
| JPH0892662A | 1996-04-09 | |||
| JPH01283339A | 1989-11-14 | |||
| JP2000226607A | 2000-08-15 |
Foreign References:
| GB1106011A | 1968-03-13 |
Attorney, Agent or Firm:
Toshio Yano
Takuya Kuno
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Takuya Kuno
Kimihiro Hoshi
Hiroyasu Ninomiya
Einzel Felix-Reinhard