Title:
非晶質硬質炭素皮膜
Document Type and Number:
Japanese Patent JP4918656
Kind Code:
B2
Abstract:
An amorphous hard carbon film comprising a first amorphous carbon layer substantially consists only of carbon formed on a substrate surface and a second amorphous carbon layer substantially consists only of carbon formed on the surface of the first amorphous carbon layer, wherein the transmission electron microscope image of the first amorphous carbon layer is brighter than that of the second amorphous carbon layer when the cross section is observed.
Inventors:
Masaki Moronuki
Takashi Matsui
Keiharu Utsumi
Hisanori Ohara
Takashi Matsui
Keiharu Utsumi
Hisanori Ohara
Application Number:
JP2005367528A
Publication Date:
April 18, 2012
Filing Date:
December 21, 2005
Export Citation:
Assignee:
Riken Co., Ltd.
Japan ITF Co., Ltd.
Japan ITF Co., Ltd.
International Classes:
C23C14/06; F16C33/10; F16C33/12
Domestic Patent References:
| JP2001192206A | ||||
| JP5202477A | ||||
| JP2002256415A | ||||
| JP2002322555A |
Foreign References:
| US6110329 |
Attorney, Agent or Firm:
Kenichiro Akao
Akira Shimoda
Akira Shimoda