Title:
圧電素子用部材
Document Type and Number:
Japanese Patent JP4931297
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To solve the problem that the warpage or waving occurs in the outer periphery of a piezoelectric ceramic plate due to the shrinkage of an adhesive layer or the polarization of the piezoelectric ceramic plate when the thin piezoelectric ceramic plate serving as a piezoelectric device member is bonded to a thick board through the intermediary of the adhesive layer. SOLUTION: When a thin piezoelectric ceramic plate 2 serving as a piezoelectric device member 1 is bonded to a thick board 3 through the intermediary of the adhesive layer 4, the surface 2b of the piezoelectric ceramic plate 2 opposite to its other adhesive surface 2a is roughened so as to have an arithmetic mean roughness (Ra) of 1 μm or below, and the piezoelectric ceramic plate 2 is polarized from the adhesive surface 2a towards the other surface 2b.
Inventors:
Taiji Tateyama
Application Number:
JP2001228020A
Publication Date:
May 16, 2012
Filing Date:
July 27, 2001
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L41/09; H01L41/22; H01L41/257; H01L41/313; H02N2/00
Domestic Patent References:
| JP6196770A | ||||
| JP6151997A | ||||
| JP5275764A | ||||
| JP4298085A | ||||
| JP9239977A | ||||
| JP11089254A | ||||
| JP11252694A |