Title:
基板及びそれを用いた窒化ガリウム系化合物半導体の成長用方法並びに窒化ガリウム系化合物半導体
Document Type and Number:
Japanese Patent JP4949181
Kind Code:
B2
Inventors:
Takanori Yasuda
Application Number:
JP2007252423A
Publication Date:
June 06, 2012
Filing Date:
September 27, 2007
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
C30B29/38; C23C16/34; C30B25/18; H01L33/32
Domestic Patent References:
| JP11238683A | ||||
| JP2000183466A | ||||
| JP9260290A | ||||
| JP2006176370A |