Title:
過酸化水素水の濃度測定方法及びそれを用いた半導体洗浄装置
Document Type and Number:
Japanese Patent JP4972452
Kind Code:
B2
Inventors:
Yoshifumi Hirano
Application Number:
JP2007116657A
Publication Date:
July 11, 2012
Filing Date:
April 26, 2007
Export Citation:
Assignee:
LAPIS Semiconductor Co., Ltd.
LAPIS Semiconductor Miyazaki Co., Ltd.
LAPIS Semiconductor Miyazaki Co., Ltd.
International Classes:
H01L21/304
Domestic Patent References:
| JP2001244233A | ||||
| JP2001085382A | ||||
| JP7099175A |
Attorney, Agent or Firm:
Kakimoto Yasunari