Title:
基板搬送装置、基板搬送モジュール、基板搬送方法及び記憶媒体
Document Type and Number:
Japanese Patent JP4973267
Kind Code:
B2
Abstract:
Disclosed is a substrate transfer apparatus including a transfer arm of a joint type having an arm portion rotatably connected with a holding portion for holding a substrate, the apparatus including: a heating unit for heating the arm portion; a temperature detection unit for detecting a temperature of the arm portion; and a control unit for heating the arm portion by the heating unit prior to a start of a transfer of the substrate, allowing the transfer of the substrate after a temperature detection value obtained by the temperature detection unit reaches a preset temperature range, and then controlling the heating unit so as to maintain the temperature detection value within the preset temperature range.
Inventors:
Keisuke Kondo
Application Number:
JP2007077500A
Publication Date:
July 11, 2012
Filing Date:
March 23, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; B25J13/08; B65G49/07
Domestic Patent References:
| JP2001102428A | ||||
| JP63316428A | ||||
| JP241880A |
Attorney, Agent or Firm:
Toshio Inoue