Title:
欠陥観察方法および装置
Document Type and Number:
Japanese Patent JP4979246
Kind Code:
B2
Abstract:
A method of inspecting defects of a sample on a movable table includes a first step for, on a basis of position information of the defects which is previously detected by an other inspection system, driving the table so that the defects come into a viewing field of an optical microscope having a focus which is adjusted, a second step for re-detecting the defects to obtain a first detection result, a third step for correcting the position information of defects on a basis of position information of the re-detected defects, and a fourth step for reviewing the defects whose position information is corrected to obtain a second detection result. At the second step, re-detecting is performed using reflection light or scattered light from the sample which passes an optical filter which includes a light shielding portion and a light transmitting portion.
Inventors:
Hidetoshi Nishiyama
Honda Toshifumi
Uto Yukio
Honda Toshifumi
Uto Yukio
Application Number:
JP2006057471A
Publication Date:
July 18, 2012
Filing Date:
March 03, 2006
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/66; G01B15/08; G01N21/956; G01N23/225; G01B11/30
Domestic Patent References:
| JP2005156537A | ||||
| JP2001133417A | ||||
| JP2001085483A |
Attorney, Agent or Firm:
Yamato Tsutsui