Title:
検査用保持部材及び検査用保持部材の製造方法
Document Type and Number:
Japanese Patent JP4991495
Kind Code:
B2
Abstract:
A holding member for use in a test includes a base made of silicon or glass and chips in which devices are formed is mountable thereon. Positioning members made of resist sheets are formed on the top surface of the base. A resist film is formed on the bottom surface of the base, and suction grooves (intersection portions, connection portions) and support members are formed in the resist film. Suction holes are formed in regions of the top surface of the base where the chips are mounted, wherein the suction holes are formed through the base and communicate with the suction groove.
Inventors:
Yasunori Kumagai
Shigekazu Komatsu
Shigekazu Komatsu
Application Number:
JP2007303950A
Publication Date:
August 01, 2012
Filing Date:
November 26, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R31/26
Domestic Patent References:
| JP2002202346A | ||||
| JP61252642A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara