To provide a solid state image sensor which prevents shading, to provide a method of manufacturing the same, and to provide an imaging apparatus using the solid state image sensor.
There are provided at least a plurality of light receiving parts in which solid state image sensors are arranged at constant pitches in two dimension, and a micro lens array in which a plurality of micro lenses are arranged in two dimension to correspond to respective light receiving parts. The arrangement pitch of micro lenses constituting the micro lens array vary, from the center of an effective imaging region toward periphery. The arrangement pitch of micro lenses can be set in two or more types, with minimum pitch difference being ≥0.2 nm. The distance from respective micro lenses to the center of the effective imaging region vary non-linearly from the center of the effective imaging region toward periphery.
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Hideo Sarada