Title:
圧力センサの製造方法および圧力センサ
Document Type and Number:
Japanese Patent JP5002420
Kind Code:
B2
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Inventors:
Uchino Hideaki
Application Number:
JP2007295268A
Publication Date:
August 15, 2012
Filing Date:
November 14, 2007
Export Citation:
Assignee:
Nidec Copal Electronics Co., Ltd.
International Classes:
G01L19/06
Domestic Patent References:
| JP4215026A | ||||
| JP2187637A | ||||
| JP3134533A | ||||
| JP1130561A |
Attorney, Agent or Firm:
Mitsuyasu Miura