Title:
真空処理装置
Document Type and Number:
Japanese Patent JP5014603
Kind Code:
B2
Abstract:
A vacuum processing apparatus includes: a plurality of carriers to be mounted with a base member; a circulation path which is kept in a controlled atmosphere and through which the carriers circulate; a plurality of base member loading and unloading chambers which are disposed in the circulation path and which load and unload the base member to and from the carriers; and a plurality of vacuum processing chambers which are disposed between the base member loading and unloading chambers in the circulation path for performing a vacuum process on the base member.
Inventors:
Eiichi Iijima
Application Number:
JP2005221099A
Publication Date:
August 29, 2012
Filing Date:
July 29, 2005
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/56
Domestic Patent References:
| JP2002176090A | ||||
| JP8096358A | ||||
| JP2002288888A | ||||
| JP6340968A |
Attorney, Agent or Firm:
Masatake Shiga
Masakazu Aoyama
Shingo Suzuki
Masakazu Aoyama
Shingo Suzuki