Title:
形状可変ミラーおよびその形状可変ミラーを用いたレーザ加工装置
Document Type and Number:
Japanese Patent JP5025538
Kind Code:
B2
Inventors:
Tomohiko Ishizuka
Masahiko Hasegawa
Uno Koji
Akizawa Kimihiko
Masahiko Hasegawa
Uno Koji
Akizawa Kimihiko
Application Number:
JP2008073554A
Publication Date:
September 12, 2012
Filing Date:
March 21, 2008
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02B5/10; B23K26/14
Domestic Patent References:
| JP2006310577A | ||||
| JP9293915A | ||||
| JP11014918A | ||||
| JP2006155850A |
Foreign References:
| WO2006075279A1 |
Attorney, Agent or Firm:
Masuo Oiwa
Toshihide Kodama
Takenaka Ikuo
Keigo Murakami
Toshihide Kodama
Takenaka Ikuo
Keigo Murakami