Title:
光学素子操作装置
Document Type and Number:
Japanese Patent JP5041810
Kind Code:
B2
Abstract:
The invention relates to an apparatus for manipulation of an optical element (7) in up to six degrees of freedom with respect to a structure (8) via at least three actuator devices (9). The actuator devices (9) each have at least two force-controlled actuators, which each produce an effective force along one degree of freedom, with linking points (11) of the actuator devices (9) acting directly on the optical element (7).
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Inventors:
Mule Bayer Michael
Lippert Johannes
Lippert Johannes
Application Number:
JP2006525734A
Publication Date:
October 03, 2012
Filing Date:
September 07, 2004
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01L21/027; G02B7/182; G02B7/198; G02B17/00; G03F7/20
Domestic Patent References:
| JP2003203860A | ||||
| JP2001351855A | ||||
| JP2000201471A | ||||
| JP2002359170A | ||||
| JP11274031A | ||||
| JP2004062091A | ||||
| JP2004281654A | ||||
| JP2005064474A |
Attorney, Agent or Firm:
Kenji Sugimura
Tatsuya Sawada
Kazuyuki Tomita
Groundwork Kenichi
Tatsuya Sawada
Kazuyuki Tomita
Groundwork Kenichi