Title:
MEMSマイクロモータおよびこのマイクロモータを装備する時計
Document Type and Number:
Japanese Patent JP5053046
Kind Code:
B2
Abstract:
The micromotor (36) has a cylindrical central shaft (64) e.g. plunging metallic axle, connected on a silicon on insulator type plate (30) which is made of crystalline or amorphous material e.g. silicon. The shaft is staged and extended across a hole (74) of the plate. The shaft is locked and centered in the hole using elastic fixation structures (96) which are formed by engraving in a substrate (32) and which are arranged on the circumference of the hole. The shaft has an external axial wall that is provided with a covering. The plate has an upper layer in which a rotor (42) is engraved.
Inventors:
Lionel Palatte
Wilfleet Noel
Jean-Pierre Revo
Nicholas Gorey
Eve petremande
Andre Zanetta
Fabian Blonde
Pierre-Andre Meister
Wilfleet Noel
Jean-Pierre Revo
Nicholas Gorey
Eve petremande
Andre Zanetta
Fabian Blonde
Pierre-Andre Meister
Application Number:
JP2007294753A
Publication Date:
October 17, 2012
Filing Date:
November 13, 2007
Export Citation:
Assignee:
Outer S.A. Manufacture Orologer Switzerland
International Classes:
H02N1/00; B81B5/00
Domestic Patent References:
| JP7241088A | ||||
| JP7177761A | ||||
| JP2151279A | ||||
| JP64008880A | ||||
| JP2008122390A | ||||
| JP2002233171A | ||||
| JP2004072993A | ||||
| JP57130595U |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa