Title:
ガス分離装置
Document Type and Number:
Japanese Patent JP5093635
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To efficiently concentrate a specified gas. SOLUTION: An exhaust gas containing PFC gas containing CF4 and NF3 generated from a production process 10, after being concentrated by a concentrator 18, is separated by a chromatographic separator 20 using nitrogen as carrier gas. The separator 20 is filled with active carbon. In this way, CF4 and NF3 in the PFC gas can be separated effectively.
Inventors:
Tetsuya Abe
Tanzawa Sadamitsu
Hiroki Seiji
Yoshinobu Tajima
Takashi Futatsugi
Naoki Fujishima
Motoshi Hiratsuka
Tanzawa Sadamitsu
Hiroki Seiji
Yoshinobu Tajima
Takashi Futatsugi
Naoki Fujishima
Motoshi Hiratsuka
Application Number:
JP2001081017A
Publication Date:
December 12, 2012
Filing Date:
March 21, 2001
Export Citation:
Assignee:
Japan Atomic Energy Agency
International Classes:
B01D53/04; C01B17/45; C01B21/083; C07C17/389; C07C19/08; H01L21/302; H01L21/3065
Domestic Patent References:
| JP10298118A | ||||
| JP5070112A | ||||
| JP61033215A | ||||
| JP51083596A | ||||
| JP3208806A | ||||
| JP7330316A | ||||
| JP8019727A |
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office