載置台の製造方法

Title:

載置台の製造方法

Document Type and Number:

Japanese Patent JP5100467

Kind Code:

B2

Inventors:

Yuya Inoue
Yasushi Tanifuji
Hisato Tanaka
Makoto Takahashi
Kuniyoshi Sekine

Application Number:

JP2008071480A

Publication Date:

December 19, 2012

Filing Date:

March 19, 2008

Export Citation:

Assignee:

ULVAC, Inc.

International Classes:

B24B41/06; B24B7/00

Domestic Patent References:

JP10289942A
JP11192452A

Attorney, Agent or Firm:

Shigeo Ishijima
Hideki Abe

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