Title:
プラズマ処理装置
Document Type and Number:
Japanese Patent JP5107597
Kind Code:
B2
Inventors:
Yohei Yamazawa
Application Number:
JP2007073575A
Publication Date:
December 26, 2012
Filing Date:
March 20, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; C23C16/52; H01L21/205; H01L21/31; H05H1/46
Domestic Patent References:
| JP2003224112A | ||||
| JP2003223999A | ||||
| JP2005277397A | ||||
| JP2004152999A | ||||
| JP2005197503A | ||||
| JP2007266365A | ||||
| JP2002043402A |
Foreign References:
| WO2004064460A1 |
Attorney, Agent or Firm:
Koji Hagiwara
Tetsuo Kanamoto
Miaki Kametani
Tetsuo Kanamoto
Miaki Kametani