Title:
感光性樹脂組成物および積層体
Document Type and Number:
Japanese Patent JP5117233
Kind Code:
B2
Inventors:
Yousuke Hata
Application Number:
JP2008073115A
Publication Date:
January 16, 2013
Filing Date:
March 21, 2008
Export Citation:
Assignee:
Asahi Kasei E-materials Co., Ltd.
International Classes:
G03F7/031; G03F7/004; G03F7/033
Domestic Patent References:
| JP2007248590A | ||||
| JP2007102184A | ||||
| JP4223470A | ||||
| JP5255420A | ||||
| JP2005325030A |
Foreign References:
| WO2007010614A1 | ||||
| WO2006126480A1 |
Attorney, Agent or Firm:
Yoshio Narui
Hideo Takei
Yoshiaki Matsui
Hideo Takei
Yoshiaki Matsui
Previous Patent: JPS5117232
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