Title:
検査装置及び検査方法
Document Type and Number:
Japanese Patent JP5123003
Kind Code:
B2
Inventors:
Fukushima Hideki
Minoru Noguchi
Shuichi Chikamatsu
Minoru Noguchi
Shuichi Chikamatsu
Application Number:
JP2008046167A
Publication Date:
January 16, 2013
Filing Date:
February 27, 2008
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01L21/66; G01N21/956
Domestic Patent References:
| JP2007107960A | ||||
| JP2007129101A | ||||
| JP2006113073A | ||||
| JP2004179581A | ||||
| JP2003083908A | ||||
| JP2000329521A | ||||
| JP7081956B2 | ||||
| JP7325623A | ||||
| JP3566589B2 |
Attorney, Agent or Firm:
Polaire Patent Business Corporation