Title:
気化装置、及び、気化装置を備えたプラズマ処理装置
Document Type and Number:
Japanese Patent JP5123567
Kind Code:
B2
Inventors:
Hiroyasu Ishida
Kazuo Ishikawa
Masahiro Kobayashi
Yasuhiko Kasama
Table Kenji
Tomohiro Konno
Kazuo Ishikawa
Masahiro Kobayashi
Yasuhiko Kasama
Table Kenji
Tomohiro Konno
Application Number:
JP2007139627A
Publication Date:
January 23, 2013
Filing Date:
May 25, 2007
Export Citation:
Assignee:
Hiroyuki Kaneko
International Classes:
C23C14/24
Domestic Patent References:
| JP2001323367A | ||||
| JP2003002778A | ||||
| JP2004152698A | ||||
| JP2006193761A | ||||
| JP2005072244A | ||||
| JP2001116215A | ||||
| JP2007500794A | ||||
| JP6056578A | ||||
| JP4348022A | ||||
| JP9143694A | ||||
| JP9004822A |
Attorney, Agent or Firm:
Hisao Fukumori